The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 24, 2018

Filed:

Mar. 10, 2017
Applicant:

Canon Kabushiki Kaisha, Tokyo, JP;

Inventors:

Takafumi Miki, Tokyo, JP;

Masahiro Kobayashi, Tokyo, JP;

Yusuke Onuki, Fujisawa, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 27/146 (2006.01); H01L 21/265 (2006.01);
U.S. Cl.
CPC ...
H01L 27/14612 (2013.01); H01L 21/26586 (2013.01); H01L 27/14603 (2013.01); H01L 27/14605 (2013.01); H01L 27/14609 (2013.01); H01L 27/14627 (2013.01); H01L 27/14689 (2013.01);
Abstract

A method of manufacturing a solid-state image sensor, including a first transistor for transferring charges from a charge accumulation region to a first charge holding region and a second transistor for transferring charges from the first charge holding region to a second charge holding region, the method comprising forming, on the semiconductor substrate, a resist pattern having a opening on the first charge holding region, and injecting a impurity via the opening so as to make the first charge holding region be a buried type, wherein the impurity is injected such that an impurity region, which makes the first charge holding region be a buried type, is formed at a position away from an end of the gate electrode of the second transistor.


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