The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 24, 2018
Filed:
Dec. 09, 2013
Oerlikon Surface Solutions Ag, Trubbach, Trubbach, CH;
Siegfried Krassnitzer, Feldkirch, AT;
Juerg Hagmann, Sax, CH;
OBERLIKON SURFACE SOLUTIONS AG, PFÄFFIKON, Pfäffikon SZ, CH;
Abstract
A plasma generating device includes a plasma source having a plasma source hollow body () and an electron emission unit () for emitting free electrons into the plasma source hollow body. The plasma source hollow body () has a first gas inlet () and a plasma source opening () which forms an opening to a vacuum chamber. An anode has an anode hollow body (). The anode hollow body () has a second gas inlet () and an anode opening () which forms an opening to the vacuum chamber, and a voltage source () the negative pole of which is connected to the electron emission unit () and the positive pole of which is connected to the anode hollow body (). The positive pole of the voltage source () is electrically connected by a first shunt () to the plasma source hollow body.