The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 24, 2018
Filed:
Sep. 30, 2015
Applicant:
Applied Materials, Inc., Santa Clara, CA (US);
Inventors:
Benjamin M. Johnston, Los Gatos, CA (US);
Jeffrey Kaskey, Livermore, CA (US);
Thomas Laidig, Richmond, CA (US);
Assignee:
APPLIED MATERIALS, INC., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/20 (2006.01); F16F 7/10 (2006.01); F16F 15/00 (2006.01); F16F 15/02 (2006.01);
U.S. Cl.
CPC ...
G03F 7/70716 (2013.01); F16F 7/1011 (2013.01); F16F 15/002 (2013.01); F16F 15/02 (2013.01);
Abstract
Systems and apparatus for performing photolithography processes are described. The system and apparatus may comprise a slab, at least one stage disposed on the slab, and a vibration damping system disposed on the slab, the vibration damping system comprising a weight that is substantially equal to a weight of one of the at least one stage and a substrate that moves simultaneously with movement of the one of the at least one stage.