The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 24, 2018
Filed:
Dec. 16, 2015
Applicant:
Stmicroelectronics S.r.l., Agrate Brianza, IT;
Inventors:
Francesco Procopio, Sedriano, IT;
Carlo Valzasina, Gessate, IT;
Assignee:
STMicroelectronics S.r.l., Agrate Brianza, IT;
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01P 15/09 (2006.01); G01L 1/16 (2006.01); H01L 41/113 (2006.01); H01L 41/25 (2013.01); H01L 41/27 (2013.01); G01P 15/08 (2006.01);
U.S. Cl.
CPC ...
G01P 15/09 (2013.01); G01L 1/16 (2013.01); G01P 15/0922 (2013.01); H01L 41/1132 (2013.01); H01L 41/25 (2013.01); H01L 41/27 (2013.01); G01P 2015/0817 (2013.01);
Abstract
The piezoelectric sensor is formed in a semiconductor material chip having a surface defining a plane and integrating a structure for sensing forces acting in the plane. The chip is formed by a substrate defining a cantilever having a first end, constrained to an anchorage portion of the substrate, and a second end, which is free to bend under the action of external forces. The cantilever has first and second longitudinal halves, each carrying a respective strip element of piezoelectric material, which extends parallel to the chip plane.