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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 10030307 B1

PDFFull Text
Date of Patent:
Jul. 24, 2018

Filed:

Jul. 26, 2012

Apparatus and process for producing thin layers

Applicants:

Christian Schmid, Freudenstadt, DE;

Dirk Habermann, Kirchzarten, DE;

Jurgen Haungs, Freudenstadt, DE;

Chuck Attema, Santa Cruz, CA (US);

Tom Stewart, Santa Cruz, CA (US);

Kenneth Provancha, Soquel, CA (US);

Inventors:

Christian Schmid, Freudenstadt, DE;

Dirk Habermann, Kirchzarten, DE;

Jurgen Haungs, Freudenstadt, DE;

Chuck Attema, Santa Cruz, CA (US);

Tom Stewart, Santa Cruz, CA (US);

Kenneth Provancha, Soquel, CA (US);

Assignee:

Gebr. Schmid GmbH, Freudenstadt, DE;

Attorney:

Akerman LLP

Primary Examiner:

Sophia Nguyen

Int. Cl.
CPC ...
C23C 16/54 (2006.01); C23C 16/455 (2006.01); C23C 16/44 (2006.01); H01L 31/20 (2006.01); C23C 16/02 (2006.01); C23C 16/46 (2006.01); C23C 16/458 (2006.01); H01L 21/67 (2006.01); H01L 21/677 (2006.01); H01L 31/0224 (2006.01); H01L 31/18 (2006.01); C23C 16/453 (2006.01); H01L 31/0216 (2014.01); C23C 16/34 (2006.01); C23C 16/40 (2006.01); H01L 21/02 (2006.01);
U.S. Cl.
CPC ...
C23C 16/54 (2013.01); C23C 16/0209 (2013.01); C23C 16/4408 (2013.01); C23C 16/4412 (2013.01); C23C 16/453 (2013.01); C23C 16/458 (2013.01); C23C 16/4551 (2013.01); C23C 16/4557 (2013.01); C23C 16/4558 (2013.01); C23C 16/4581 (2013.01); C23C 16/45521 (2013.01); C23C 16/45578 (2013.01); C23C 16/45595 (2013.01); C23C 16/466 (2013.01); C23C 16/545 (2013.01); H01L 21/6776 (2013.01); H01L 21/67115 (2013.01); H01L 21/67706 (2013.01); H01L 31/02167 (2013.01); H01L 31/022425 (2013.01); H01L 31/18 (2013.01); H01L 31/1884 (2013.01); H01L 31/206 (2013.01); C23C 16/345 (2013.01); C23C 16/402 (2013.01); C23C 16/403 (2013.01); H01L 21/02271 (2013.01); H01L 31/02168 (2013.01); Y02E 10/50 (2013.01);
Abstract

In an apparatus for producing thin layers on substrates for solar cell production, wherein the thin layers are applied by an APCVD process at temperatures of more than 250° C., the substrates are conveyed on a horizontal conveyor path and coated by means of an APCVD coating in continuous operation. The conveyor path has conveyor rollers, which consist of a temperature-resistant, non-metallic material, preferably of ceramic. A heating device and/or a purge gas feeding device is/are arranged on that side of the conveyor path which is remote from the coating apparatus.

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