The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 24, 2018

Filed:

Feb. 09, 2015
Applicant:

Brooks Automation, Inc., Chelmsford, MA (US);

Inventor:

Izya Kremerman, Los Gatos, CA (US);

Assignee:

Brooks Automation, Inc., Chelmsford, MA (US);

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
B25J 18/04 (2006.01); B25J 9/04 (2006.01); B25J 9/12 (2006.01); H01L 21/677 (2006.01); B25J 15/02 (2006.01);
U.S. Cl.
CPC ...
B25J 9/044 (2013.01); B25J 9/042 (2013.01); B25J 9/126 (2013.01); H01L 21/67742 (2013.01); B25J 15/0246 (2013.01); H01L 21/67739 (2013.01); Y10S 901/17 (2013.01); Y10S 901/23 (2013.01); Y10T 74/20317 (2015.01); Y10T 74/20323 (2015.01); Y10T 74/20341 (2015.01);
Abstract

A robot assembly for transporting a substrate is presented. The robot assembly having a first arm and a second arm supported by a column, the first arm further having a first limb, the first limb having a first set of revolute joint/line pairs configured to provide translation and rotation of the distal most link of the first limb in the horizontal plane. The assembly further having a second arm further having a second limb, the second limb comprising a second set of revolute joint/link pairs configured to provide translation and rotation of a distalmost link of the second limb in the horizontal plane. The first limb and second limb further having proximal revolute joints having a common vertical axis of rotation and a proximal inner joint housed in a common housing. The assembly further having an actuator assembly coupled to the first set of revolute joint/link pairs and to the second set of revolute joint/link pairs to effect rotation and translation of the distalmost links of the first limb and the second limb, each of the first limb and the second limb defining, in conjunction with the actuator assembly, at least three degrees of freedom per limb, whereby the distalmost links of the first limb and the second limb are independently horizontally translatable for extension and retraction.


Find Patent Forward Citations

Loading…