The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 17, 2018
Filed:
Aug. 31, 2017
Eth Zürich, Zürich, CH;
ETH ZÜRICH, Zürich, CH;
Abstract
The invention relates to a device () for generating UV or X-ray radiation (R) by means of a plasma (), comprising a first compartment (), a dispensing device (), which is adapted to provide a target material () in the first compartment (), an excitation light source () for providing an excitation light beam (), and a buffer gas inlet () and/or a buffer gas outlet () for providing a buffer gas flow (B) along the direction (D) of the excitation light beam () in the first compartment (), wherein the first compartment () is adapted to be at least partially heated by a heating device (). The invention further relates to a method for generating UV or X-ray radiation (R) by means of the device ().