The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 17, 2018

Filed:

Sep. 20, 2016
Applicant:

Nikon Corporation, Tokyo, JP;

Inventors:

Osamu Saruwatari, Yokohama, JP;

Shigeru Aoki, Yokohama, JP;

Kazuya Okamoto, Yokohama, JP;

Isao Sugaya, Kawasaki, JP;

Masashi Okada, Sagamihara, JP;

Hiroshi Ohki, Yokohama, JP;

Assignee:

NIKON CORPORATION, Tokyo, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 27/146 (2006.01); H01L 25/065 (2006.01); H01L 25/07 (2006.01); H01L 25/18 (2006.01); H01L 31/10 (2006.01); H04N 5/3745 (2011.01); H01L 25/00 (2006.01); G01S 17/89 (2006.01); G01S 7/486 (2006.01); G01S 7/487 (2006.01); G01S 7/491 (2006.01); G01S 7/493 (2006.01);
U.S. Cl.
CPC ...
H01L 27/14634 (2013.01); G01S 7/4863 (2013.01); G01S 7/4876 (2013.01); G01S 7/493 (2013.01); G01S 7/4914 (2013.01); G01S 17/89 (2013.01); H01L 25/065 (2013.01); H01L 25/07 (2013.01); H01L 25/18 (2013.01); H01L 25/50 (2013.01); H01L 27/14643 (2013.01); H01L 31/10 (2013.01); H04N 5/3745 (2013.01); H01L 2924/0002 (2013.01);
Abstract

A detector comprises a plurality of photoelectric converters to output an electrical signal corresponding to an incident light, and a plurality of filter circuits provided corresponding to each of the plurality of photoelectric converters or to each of a plurality of element groups respectively including a predetermined number of the photoelectric converters of the plurality of photoelectric converters, the plurality of filter circuits attenuating a signal having a predetermined frequency from the electrical signal output from the plurality of photoelectric converters, In the above-described detector, the plurality of photoelectric converters may be provided in a first substrate, and the plurality of filter circuits may be provided in a second substrate laminated on the first substrate.


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