The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 17, 2018

Filed:

Sep. 03, 2015
Applicants:

Hyosig Won, Suwon-si, KR;

Daijoon Hyun, Seoul, KR;

Kwangok Jeong, Hwaseong-si, KR;

Inventors:

Hyosig Won, Suwon-si, KR;

DaiJoon Hyun, Seoul, KR;

Kwangok Jeong, Hwaseong-si, KR;

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01R 31/26 (2014.01); G01R 31/27 (2006.01); H01L 21/66 (2006.01); G11C 29/50 (2006.01); H01L 21/8234 (2006.01); G11C 11/417 (2006.01); G11C 29/04 (2006.01);
U.S. Cl.
CPC ...
H01L 22/14 (2013.01); G01R 31/2601 (2013.01); G01R 31/2621 (2013.01); G11C 29/50 (2013.01); H01L 21/823475 (2013.01); H01L 22/32 (2013.01); H01L 22/34 (2013.01); G11C 11/417 (2013.01); G11C 2029/0403 (2013.01); G11C 2029/5004 (2013.01); G11C 2029/5006 (2013.01);
Abstract

Provided is a method for testing a plurality of transistors of a semiconductor device. The method includes forming a plurality of elements or a plurality of logic using a Front End Of Line (FEOL) process, forming a selection logic using at least one of the plurality of elements or the plurality of logic cells, connecting the selection logic and the plurality of transistors, forming a pad for connecting an input terminal of the selection logic and drain or source terminals of the plurality of transistors, and sequentially selecting the plurality of transistors using the selection logic and measuring an electrical characteristic of selected transistors among the plurality of transistors.


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