The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 17, 2018
Filed:
Jul. 20, 2016
Vishal Khosla, San Jose, CA (US);
Nick Doe, San Jose, CA (US);
Jun Xiao, San Jose, CA (US);
Ming Chan, San Jose, CA (US);
Gautam Char, San Jose, CA (US);
Vishal Khosla, San Jose, CA (US);
Nick Doe, San Jose, CA (US);
Jun Xiao, San Jose, CA (US);
Ming Chan, San Jose, CA (US);
Gautam Char, San Jose, CA (US);
RTEC-INSTRUMENTS, INC., San Jose, CA (US);
Abstract
An apparatus for in-line testing and surface analysis of a sample contains a base which stationarily supports a column and moveably supports an optical microscope, an interferometer, and at least test unit such as a scratch and abrasive wear tester that are moveable on the column in the Z-axis direction. A sample secured on a sample table, which is supported by a replaceable tribology drive unit on an X-stage that may position the sample under the microscope, interferometer, or test unit. Depending on the type of the test, the replaceable tribology unit may impart to the sample either a linear reciprocating movement or a rotating movement. The apparatus may operate in an automatic mode and is provided with a central processing unit that control movements of all moveable units through respective drivers via controllers connected to the central processing unit.