The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 17, 2018

Filed:

Oct. 05, 2015
Applicant:

Japan Display Inc., Tokyo, JP;

Inventors:

Toshihiro Sato, Tokyo, JP;

Takeshi Ookawara, Tokyo, JP;

Assignee:

Japan Display Inc., Tokyo, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 14/04 (2006.01); H01L 51/50 (2006.01); H01L 21/033 (2006.01); H01L 21/308 (2006.01); H01L 21/027 (2006.01); C23C 8/04 (2006.01);
U.S. Cl.
CPC ...
C23C 14/042 (2013.01); H01L 21/0332 (2013.01); H01L 21/0334 (2013.01); H01L 21/3086 (2013.01); H01L 51/5012 (2013.01); C23C 8/04 (2013.01); H01L 21/0275 (2013.01);
Abstract

The purpose is providing a vapor deposition mask with high rigidity which can evaporate a uniform thickness film. A vapor deposition mask including a mask body having a main opening, a side surface of the main opening, an upper surface intersecting the side surface, and a lower surface opposing the upper surface, a first insulator contacting the lower surface, and a second insulator contacting the upper and side surfaces, wherein the first insulator includes a first region inside the main opening, and a first opening in the first region, the second insulator includes a second region inside the main opening, and a second opening in the second region, the mask body is sandwiched between the first and second insulators, and one of the first and second insulators includes a region located inside the main opening more centrally than the other and not overlapping with the other and the mask body.


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