The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 10, 2018

Filed:

Nov. 30, 2016
Applicant:

Hestia Power Inc., Hsinchu, TW;

Inventors:

Cheng-Tyng Yen, Hsinchu, TW;

Chien-Chung Hung, Hsinchu, TW;

Hsiang-Ting Hung, Hsinchu, TW;

Yao-Feng Huang, Hsinchu, TW;

Chwan-Ying Lee, Hsinchu, TW;

Assignee:

HESTIA POWER INC., Hsinchu, TW;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 29/16 (2006.01); H01L 29/10 (2006.01); H01L 29/78 (2006.01); H01L 29/08 (2006.01); H01L 29/739 (2006.01); H01L 29/04 (2006.01); H01L 29/417 (2006.01); H01L 21/04 (2006.01); H01L 29/66 (2006.01);
U.S. Cl.
CPC ...
H01L 29/1608 (2013.01); H01L 21/047 (2013.01); H01L 29/0865 (2013.01); H01L 29/1095 (2013.01); H01L 29/66068 (2013.01); H01L 29/7393 (2013.01); H01L 29/7396 (2013.01); H01L 29/7802 (2013.01); H01L 29/7816 (2013.01); H01L 29/41766 (2013.01);
Abstract

A silicon carbide (SiC) semiconductor element includes a semiconductor layer, a dielectric layer on a surface of the semiconductor layer, a gate electrode layer on the dielectric layer, a first doped region, a second doped region, a shallow doped region and a third doped region. The semiconductor layer is of a first conductivity type. The first doped region is of a second conductivity type and includes an upper doping boundary spaced from the surface by a first depth. The shallow doped region is of the second conductivity type, and extends from the surface to a shallow doped depth. The second doped region is adjacent to the shallow doped region and is at least partially in the first doped region. The third doped region is of the second conductivity type and at least partially overlaps the first doped region.


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