The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 10, 2018
Filed:
Oct. 06, 2017
Applicant:
The Charles Stark Draper Laboratory, Inc., Cambridge, MA (US);
Inventors:
Eugene H. Cook, Acton, MA (US);
Amy Duwel, Cambridge, MA (US);
David J. Carter, Concord, MA (US);
Gayatri E. Perlin, Arlington, MA (US);
Assignee:
THE CHARLES STARK DRAPER LABORATORY, INC., Cambridge, MA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/683 (2006.01); H01L 21/78 (2006.01); H01L 21/304 (2006.01); H01L 21/3065 (2006.01); H01L 23/00 (2006.01); G06K 19/073 (2006.01);
U.S. Cl.
CPC ...
H01L 21/6835 (2013.01); G06K 19/07381 (2013.01); H01L 21/304 (2013.01); H01L 21/3065 (2013.01); H01L 21/78 (2013.01); H01L 23/57 (2013.01); H01L 2221/68327 (2013.01);
Abstract
A method of fabricating ultra-thin semiconductor devices includes forming an array of semiconductor dielets mechanically suspended on a frame with at least one tether connecting each semiconductor dielet of the array of semiconductor dielets to the frame.