The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 10, 2018

Filed:

Dec. 03, 2014
Applicant:

Canon Kabushiki Kaisha, Tokyo, JP;

Inventors:

Shuji Yamada, Atsugi, JP;

Takeo Tsukamoto, Kawasaki, JP;

Takao Ogura, Yokohama, JP;

Tadayuki Yoshitake, Cambridge, MA (US);

Yoichi Ikarashi, Fujisawa, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 35/00 (2006.01); H01J 35/08 (2006.01); G01N 23/04 (2018.01); H01J 35/04 (2006.01); C23C 16/01 (2006.01); C23C 16/27 (2006.01);
U.S. Cl.
CPC ...
H01J 35/08 (2013.01); C23C 16/01 (2013.01); C23C 16/27 (2013.01); G01N 23/04 (2013.01); H01J 35/045 (2013.01); H01J 2235/02 (2013.01); H01J 2235/081 (2013.01); H01J 2235/084 (2013.01); H01J 2235/087 (2013.01); H01J 2235/186 (2013.01);
Abstract

A transmissive-type target includes a target layer, and a transmissive substrate configured to support the target layer. The transmissive substrate has a pair of surfaces facing each other and is formed of polycrystalline diamond. In the transmissive substrate, one of the pair of surfaces includes polycrystalline diamond having a first average crystal grain diameter which is smaller than a second average crystal grain diameter of polycrystalline diamond included on the other surface opposing thereto. The target layer is supported by any one of the pair of surfaces.


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