The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 10, 2018
Filed:
Mar. 03, 2015
Canon Kabushiki Kaisha, Tokyo, JP;
Yoshiyuki Usui, Utsunomiya, JP;
CANON KABUSHIKI KAISHA, Tokyo, JP;
Abstract
The present invention provides an imprint apparatus which forms a pattern in an imprint material on a substrate using a mold, the apparatus including a stage configured to hold the substrate, a holding mechanism configured to hold the mold, a scope configured to detect a mark provided on the mold, a driving mechanism configured to drive the scope to locate the mark provided on the mold within a field of view of the scope, and a processing unit configured obtain a positional shift amount from a reference position of the mold held by the holding mechanism based on a driving amount of the scope required for positioning the scope, and perform alignment between the mold and the substrate based on the positional shift amount.