The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 10, 2018
Filed:
May. 06, 2015
Jvc Kenwood Corporation, Yokohama-shi, JP;
JVC KENWOOD Corporation, Yokohama-shi, JP;
Abstract
Provided is a MEMS optical scanner that stably performs a scan with light by rotary moving a mirror centering on a V-axis in coincidence with a resonant frequency that enables ramp wave driving while securing shock resistance. The MEMS optical scanner includes a first substrate, a driving portion that drives the mirror by a piezoelectric film in a first axial direction where the piezoelectric film is installed on the first substrate, a frame that supports a driving portion, a second substrate, a support portion that supports the first substrate, a frame portion spaced from and surrounding the support portion, and an axis portion that supports the support portion and the frame portion along a second axial direction. It also includes a rigidity giving portion fixed to the second substrate at both ends thereof along the second axial direction and that drives the support portion in the second axial direction.