The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 10, 2018

Filed:

May. 31, 2016
Applicant:

Canon Kabushiki Kaisha, Tokyo, JP;

Inventor:

Tsuyoshi Yamazaki, Saitama, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01B 11/24 (2006.01); B23P 19/04 (2006.01); G01B 11/25 (2006.01); B25J 19/02 (2006.01); G06T 1/00 (2006.01); G06T 7/521 (2017.01);
U.S. Cl.
CPC ...
B23P 19/04 (2013.01); B25J 19/023 (2013.01); G01B 11/25 (2013.01); G01B 11/2513 (2013.01); G06T 1/0014 (2013.01); G06T 7/521 (2017.01);
Abstract

The present invention provides a measurement apparatus for measuring a shape of an object to be measured, including a processing unit configured to obtain information on the shape of the object to be measured based on an image obtained by imaging the object to be measured onto which pattern light alternately including a bright portion and a dark portion along a first direction is projected, wherein the processing unit obtains a plurality of first signals different from each other and indicating a light intensity distribution in a second direction intersecting the first direction, from a region of the image, which corresponds to the dark portion.


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