The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 03, 2018
Filed:
Dec. 14, 2015
Kawasaki Jukogyo Kabushiki Kaisha, Kobi-shi, Hyogo, JP;
Kawasaki Robotics (Usa), Inc., Wixom, MI (US);
Masaya Yoshida, Himeji, JP;
Takao Yamaguchi, Fremnog, CA (US);
Yuji Tanaka, Sunnyvale, CA (US);
Hajime Nakahara, San Jose, CA (US);
Avish Ashok Bharwani, Santa Clara, CA (US);
Ming Zeng, San Jose, CA (US);
Hui Kuen Chan, San Francisco, CA (US);
KAWASAKI JUKOGYO KABUSHIKI KAISHA, Kobe, JP;
KAWASAKI ROBOTICS (USA), INC., Wixom, MI (US);
Abstract
A substrate conveyance robot has an end effector provided to a robot arm and including a substrate holding unit configured to hold a substrate, arm drive unit configured to drive the robot arm, a robot control unit configured to control the arm drive unit, and a holding force detection unit configured to detect a substrate holding force exerted by the substrate holding unit. The robot control unit controls the arm drive unit based on an upper limit value of at least one of acceleration and speed of the end effector which are determined in accordance with the substrate holding force detected by the holding force detection unit.