The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 03, 2018
Filed:
Dec. 16, 2016
Solarcity Corporation, San Mateo, CA (US);
Edward Sung, Milpitas, CA (US);
SolarCity Corporation, San Mateo, CA (US);
Abstract
Systems and methods are described for transferring wafers between processing steps in the fabrication of solar cells. The wafers may be processed using a cluster tool including a load-lock, a plurality of processing modules, and a central robot to transfer wafers between the plurality of modules. Each module may include a pedestal including wafer recesses to support the wafers, and puck recesses for supporting ferromagnetic pucks below the wafers. The central robot includes electromagnets for attracting the ferromagnetic pucks toward the electro magnets in order to clamp the wafers between the ferromagnetic pucks and the electromagnets.