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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 10014200 B1

PDFFull Text
Date of Patent:
Jul. 03, 2018

Filed:

Dec. 12, 2014

Gas injection device and assisting member

Applicant:

Murata Machinery, Ltd., Kyoto-shi, Kyoto, JP;

Inventors:

Masanao Murata, Mie, JP;

Takashi Yamaji, Mie, JP;

Assignee:

MURATA MACHINERY, LTD., Kyoto, JP;

Attorney:

Keating & Bennett, LLP

Primary Examiner:

Timothy L Maust

Int. Cl.
CPC ...
H01L 21/67 (2006.01); H01L 21/673 (2006.01); H01L 21/677 (2006.01); F17C 5/00 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67389 (2013.01); F17C 5/00 (2013.01); H01L 21/67393 (2013.01); H01L 21/67745 (2013.01); F17C 2205/0335 (2013.01); F17C 2221/00 (2013.01); F17C 2270/0518 (2013.01);
Abstract

A gas injection device a placement portion on which a first or second container is placed, an ejection portion which is placed on the placement portion and ejects a purge gas, and a sealing portion protruding from the placement portion so as to surround a periphery of the ejection portion. The ejection portion, with the purge gas being injected into an inlet of the second container, does not come in contact with the inlet. The sealing portion, with the purge gas being injected into an inlet of the FOUP, does not impede the contact between the ejection portion and the inlet.

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Murata, Masanao. (2018). Gas injection device and assisting member (U.S. Patent No. 10014200). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/10014200

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