The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 03, 2018
Filed:
May. 04, 2015
Semilab Sdi Llc, Tampa, FL (US);
Zoltan Tamas Kiss, Budapest, HU;
Laszlo Dudas, PĂ©cel, HU;
Zsolt Kovacs, Budapest, HU;
Imre Lajtos, Budapest, HU;
Gyorgy Nadudvari, Pilisszentivan, HU;
Nicolas Laurent, Singapore, SG;
Lubomir L. Jastrzebski, Clearwater, FL (US);
SEMILAB Semiconductor Physics Laboratory Co., Ltd., Budapest, HU;
Abstract
In an example implementation, a method includes illuminating a wafer with excitation light having a wavelength and intensity sufficient to induce photoluminescence in the wafer. The method also includes detecting photoluminescence emitted from a portion of the wafer in response to the illumination, and detecting excitation light reflected from the portion of the wafer. The method also includes comparing the photoluminescence emitted from the portion of the wafer and the excitation light reflected from the portion of the wafer, and identifying one or more defects in the wafer based on the comparison.