The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 03, 2018
Filed:
Dec. 31, 2015
Applicant:
L'air Liquide, Société Anonyme Pour I'etude ET I'exploitation Des Procédés Georges Claude, Paris, FR;
Inventors:
Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 16/00 (2006.01); C23C 16/42 (2006.01); C23C 16/18 (2006.01); C23C 16/30 (2006.01); C23C 16/36 (2006.01);
U.S. Cl.
CPC ...
C23C 16/42 (2013.01); C23C 16/18 (2013.01); C23C 16/30 (2013.01); C23C 16/36 (2013.01);
Abstract
Manganese-containing film forming compositions, their preparation, and their use for the vapor deposition of films are disclosed. The manganese-containing film forming compositions comprise silylamide-containing precursors, particularly {Mn[N(SiMeEt)]}.