The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 03, 2018
Filed:
Feb. 22, 2017
Piezoelectric film, production method thereof, piezoelectric element, and liquid discharge apparatus
Applicant:
Fujifilm Corporation, Tokyo, JP;
Inventors:
Naoki Murakami, Kanagawa-ken, JP;
Takami Arakawa, Kanagawa-ken, JP;
Takamichi Fujii, Kanagawa-ken, JP;
Assignee:
FUJIFILM Corporation, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 41/187 (2006.01); B41J 2/14 (2006.01); B41J 2/16 (2006.01); C23C 14/34 (2006.01); C23C 14/08 (2006.01); H01L 41/047 (2006.01); H01L 41/18 (2006.01); C23C 14/00 (2006.01); H01L 41/00 (2013.01);
U.S. Cl.
CPC ...
B41J 2/14209 (2013.01); B41J 2/1607 (2013.01); B41J 2/1646 (2013.01); C23C 14/08 (2013.01); C23C 14/3471 (2013.01); H01L 41/047 (2013.01); H01L 41/183 (2013.01); C23C 14/00 (2013.01); H01L 41/00 (2013.01);
Abstract
A piezoelectric film of the present invention is a piezoelectric film including a perovskite oxide represented by the following formula (P), in which crystal phases of the perovskite oxide include tetragonal crystals and rhombohedral crystals at a ratio that satisfies the following formula (1).A[(ZrTi)Nb]O  (P)0.70≤rhombohedral crystals/(rhombohedral crystals+tetragonal crystals)≤0.95   (1),