The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 26, 2018
Filed:
Oct. 01, 2015
Applicant:
Fujitsu Limited, Kawasaki-shi, Kanagawa, JP;
Inventor:
Shintaro Sato, Atsugi, JP;
Assignee:
FUJITSU LIMITED, Kawasaki, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 29/16 (2006.01); H01L 29/786 (2006.01); H01L 21/04 (2006.01); H01L 29/66 (2006.01); B82Y 40/00 (2011.01); H01L 29/778 (2006.01); C01B 32/16 (2017.01); C01B 32/184 (2017.01); H01L 51/00 (2006.01); H01L 29/06 (2006.01); H01L 29/51 (2006.01);
U.S. Cl.
CPC ...
H01L 29/78618 (2013.01); B82Y 40/00 (2013.01); C01B 32/16 (2017.08); C01B 32/184 (2017.08); H01L 21/043 (2013.01); H01L 29/1606 (2013.01); H01L 29/66045 (2013.01); H01L 29/778 (2013.01); H01L 29/78603 (2013.01); H01L 29/78684 (2013.01); H01L 29/0673 (2013.01); H01L 29/517 (2013.01); H01L 51/0045 (2013.01);
Abstract
A connecting structure includes: a Si substrate; a nanocarbon material formed above the Si substrate; and an electrode electrically connected to the nanocarbon material, wherein a molecular material having a doping function is inserted between the Si substrate and the nanocarbon material. With this configuration, a highly-reliable connecting structure and a method for manufacturing the same are obtained which realize, even though using the nanocarbon material, a sufficiently low contact resistance between the nanocarbon material and the electrode.