The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 26, 2018

Filed:

Dec. 19, 2014
Applicant:

Mediatek Inc., Hsin-Chu, TW;

Inventors:

Chih-Chung Chiu, Zhunan Township, Miaoli County, TW;

Puo-Yu Chiang, Su'ao Township, Yilan County, TW;

Assignee:

MediaTek Inc., Hsin-Chu, TW;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 29/78 (2006.01); H01L 21/265 (2006.01); H01L 29/66 (2006.01); H01L 29/10 (2006.01); H01L 29/08 (2006.01);
U.S. Cl.
CPC ...
H01L 29/7816 (2013.01); H01L 21/26513 (2013.01); H01L 29/086 (2013.01); H01L 29/1095 (2013.01); H01L 29/66659 (2013.01); H01L 29/66681 (2013.01); H01L 29/7833 (2013.01); H01L 29/7835 (2013.01); H01L 29/0878 (2013.01);
Abstract

A semiconductor device includes a well region of a first conductivity type, having a first depth, formed in a substrate. A source contact region of a second conductivity type is formed in the well region. A drift region of the second conductivity type, having a second depth greater than 50% of the first depth, is formed in the substrate adjacent to the well region. A drain contact region of the second conductivity type is formed in the drift region. A gate electrode is formed on the substrate between the source contact region and the drain contact region. The drain contact region is spaced apart from the gate electrode and the source contact region is adjacent to the gate electrode. Furthermore, a method of fabricating a semiconductor device is also provided. The method includes performing a multi-step implantation process to form a drift region.


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