The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 26, 2018
Filed:
Dec. 01, 2015
Samsung Electronics Co., Ltd., Suwon-si, Gyeonggi-do, KR;
Samsung Display Co., Ltd., Yongin, Gyeonggi-do, KR;
Wonguk Seo, Gunpo-si, KR;
Kyoungchon Kim, Goyang-si, KR;
Kuihyun Yoon, Seoul, KR;
Kyunlae Kim, Suwon-si, KR;
Jaeyoung Park, Hwaseong-si, KR;
Kyoungho Yang, Hwaseong-si, KR;
Young Heo, Osan-si, KR;
Abstract
Provided is an optical inspection system including a supporting unit, allowing a target object to be loaded thereon, a light source unit configured to emit a laser beam toward the target object, a light condensing unit collecting scattered light that is scattered at the target object when the laser beam is irradiated onto the target object, and a control unit controlling the light source unit and the light condensing unit and analyzing the scattered light to examine whether there are pollutants on the target object. The supporting unit may include a first supporting unit, on which the target object is disposed, and which is formed of a first material, and a second supporting unit, which is disposed under the first supporting unit and is formed of a second material different from the first material.