The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 26, 2018

Filed:

Jul. 28, 2014
Applicant:

Nederlandse Organisatie Voor Toegepast-natuurwetenschappelijk Onderzoek Tno, 's-Gravenhage, NL;

Inventors:

Ike Gerke De Vries, 's-Gravenhage, NL;

Maarten van Lent, 's-Gravenhage, NL;

Jeroen Anthonius Smeltink, 's-Gravenhage, NL;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B05C 3/02 (2006.01); C23C 16/52 (2006.01); B05C 5/02 (2006.01); B05C 11/10 (2006.01); B05B 13/04 (2006.01);
U.S. Cl.
CPC ...
C23C 16/52 (2013.01); B05C 3/02 (2013.01); B05C 5/0254 (2013.01); B05C 5/0258 (2013.01); B05C 11/1018 (2013.01); B05B 13/0473 (2013.01);
Abstract

A slot-die coating apparatus for manufacturing a patterned coating layer () on a substrate () comprises a substrate carrier (), a coating device, a sensor facility () and a controller (). The substrate carrier () is arranged on a support for providing the substrate (). The coating device comprises a head-side unit and a support-side unit (resp.) that are mutually movable with respect to each other by a motor (). The head-side unit comprises a translator part () and a slot-die coating head (). The support-side unit () comprises a stator part () of the motor. The controller () controls the motor () to position the slot-die coating head at a desired distance (Ds). The support-side unit () has a mass that is at least equal to the mass of the head-side unit (), and the support-side unit () is flexibly coupled to the support ().


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