The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 10005795 B1

PDF
Full Text
Expired
Date of Patent:
Jun. 26, 2018

Filed:

Feb. 03, 2017
Applicant:

Up Chemical Co., Ltd., Pyeongtaek-si, Gyeonggi-do, KR;

Inventors:

Won Seok Han, Pyeongtaek-si, KR;

Wonyong Koh, Daejeon, KR;

Myeong-Ho Park, Suwon-si, KR;

Assignee:

UP CHEMICAL CO., LTD., Pyeongtaek-si, Gyeonggi-do, KR;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C07F 7/00 (2006.01); C23C 16/455 (2006.01); C23C 16/18 (2006.01); C07F 7/28 (2006.01);
U.S. Cl.
CPC ...
C07F 7/00 (2013.01); C07F 7/28 (2013.01); C23C 16/18 (2013.01); C23C 16/45553 (2013.01);
Abstract

The present disclosure provides a Group 4 metal element-containing novel compound, a method of preparing the Group 4 metal element-containing compound, a precursor composition including the Group 4 metal element-containing compound for depositing a film, and a method of depositing a Group 4 metal element-containing film using the precursor composition.


Find Patent Forward Citations

Han, Won. (2018). Group 4 metal element-containing compound, method of preparing the same, precursor composition including the same for depositing film, and method of depositing film using the same (U.S. Patent No. 10005795). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/10005795

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