The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 19, 2018

Filed:

Dec. 19, 2013
Applicant:

Commissariat a L'energie Atomique ET Aux Ene Alt, Paris, FR;

Inventors:

Stephane Fanget, Le Grand Lemps, FR;

Remy DeJaeger, Eveux, FR;

Philippe Robert, Grenoble, FR;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 41/09 (2006.01); H04R 3/00 (2006.01); H04R 19/00 (2006.01); H01L 41/08 (2006.01); H04R 17/00 (2006.01); H04R 1/00 (2006.01);
U.S. Cl.
CPC ...
H01L 41/09 (2013.01); H01L 41/0825 (2013.01); H04R 3/002 (2013.01); H04R 17/00 (2013.01); H04R 19/005 (2013.01); H04R 1/005 (2013.01);
Abstract

Membrane device comprising a support, a membrane suspended on the support, a first actuator in contact with the membrane designed to apply a force on the membrane, a second actuator in contact with the membrane designed to apply a force on the membrane, means of determining the position of the membrane relative to the support and control means of the first and second actuators, said control means applying a deformation signal to one of the first and second actuators to deform the membrane and applying a control signal to the other of the first and second actuators to control displacement of the membrane, application of the control signal being determined by the membrane position.


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