The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 19, 2018

Filed:

Feb. 27, 2015
Applicant:

Lfoundry S.r.l., Avezzano, IT;

Inventors:

Gerhard Spitzlsperger, Ergolding, DE;

Carsten Schmidt, Landshut, DE;

Assignee:

LFoundry S.r.l., Avezzano, IT;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 29/66 (2006.01); H01L 23/00 (2006.01); H01L 21/768 (2006.01); H01L 21/8234 (2006.01); H01L 21/74 (2006.01); H01L 21/762 (2006.01); H01L 29/06 (2006.01); H01L 29/808 (2006.01); H01L 29/732 (2006.01); H01L 23/522 (2006.01); H01L 23/528 (2006.01); H01L 27/092 (2006.01); H01L 29/417 (2006.01); H01L 29/40 (2006.01); H01L 29/78 (2006.01); H01L 29/08 (2006.01); H01L 29/739 (2006.01); H01L 29/74 (2006.01);
U.S. Cl.
CPC ...
H01L 23/562 (2013.01); H01L 21/743 (2013.01); H01L 21/76224 (2013.01); H01L 21/76898 (2013.01); H01L 21/823418 (2013.01); H01L 23/528 (2013.01); H01L 23/5226 (2013.01); H01L 24/43 (2013.01); H01L 27/092 (2013.01); H01L 29/0634 (2013.01); H01L 29/0649 (2013.01); H01L 29/402 (2013.01); H01L 29/41708 (2013.01); H01L 29/66272 (2013.01); H01L 29/66333 (2013.01); H01L 29/66681 (2013.01); H01L 29/66712 (2013.01); H01L 29/732 (2013.01); H01L 29/7395 (2013.01); H01L 29/7811 (2013.01); H01L 29/7823 (2013.01); H01L 29/808 (2013.01); H01L 29/0878 (2013.01); H01L 29/407 (2013.01); H01L 29/4175 (2013.01); H01L 29/41766 (2013.01); H01L 29/66659 (2013.01); H01L 29/66696 (2013.01); H01L 29/7398 (2013.01); H01L 29/74 (2013.01); H01L 29/7802 (2013.01); H01L 29/7824 (2013.01); H01L 29/7835 (2013.01); H01L 2224/4502 (2013.01);
Abstract

A method of fabricating a semiconductor product including processing of a semiconductor wafer from a front surface including structures disposed in the substrate of the wafer adjacent to the front surface and forming a wiring embedded in a dielectric layer disposed on the front surface. The wafer is mounted to a carrier wafer at its front surface so that material can be removed from the backside of the wafer to thin the wafer. Backside processing of the wafer includes forming implantations from the backside, forming deep trenches to isolate the structures from other structures within the wafer, forming a through-silicon via to contact features on the frontside of the wafer, and forming a body contact. Several devices can be generated within the same wafer.


Find Patent Forward Citations

Spitzlsperger, Gerhard. (2018). Method of fabricating a semiconductor device and semiconductor product (U.S. Patent No. 10002836). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/10002836

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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