The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 19, 2018

Filed:

Oct. 14, 2015
Applicant:

Qualcomm Incorporated, San Diego, CA (US);

Inventors:

Hrishikesh Vijaykumar Panchawagh, San Jose, CA (US);

Hao-Yen Tang, Berkeley, CA (US);

Yipeng Lu, Davis, CA (US);

Kostadin Dimitrov Djordjev, San Jose, CA (US);

Suryaprakash Ganti, Los Altos, CA (US);

David William Burns, San Jose, CA (US);

Ravindra Vaman Shenoy, Dublin, CA (US);

Jon Bradley Lasiter, Stockton, CA (US);

Nai-Kuei Kuo, San Jose, CA (US);

Firas Sammoura, San Jose, CA (US);

Assignee:

QUALCOMM Incorporated, San Diego, CA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 41/09 (2006.01); H01L 41/113 (2006.01); B06B 1/06 (2006.01); G01S 7/52 (2006.01); H01L 41/047 (2006.01); G10K 11/34 (2006.01); G06F 3/041 (2006.01); G06F 3/043 (2006.01); G06K 9/00 (2006.01); G10K 11/26 (2006.01); G01S 7/521 (2006.01); G01S 15/04 (2006.01); G01S 15/89 (2006.01); H01L 41/08 (2006.01); B06B 1/02 (2006.01);
U.S. Cl.
CPC ...
G01S 7/5208 (2013.01); B06B 1/0207 (2013.01); B06B 1/0607 (2013.01); B06B 1/0644 (2013.01); B06B 1/0666 (2013.01); G01S 7/521 (2013.01); G01S 15/04 (2013.01); G01S 15/89 (2013.01); G01S 15/8915 (2013.01); G06F 3/0412 (2013.01); G06F 3/0416 (2013.01); G06F 3/0436 (2013.01); G06K 9/0002 (2013.01); G06K 9/00335 (2013.01); G10K 11/26 (2013.01); G10K 11/34 (2013.01); G10K 11/346 (2013.01); H01L 41/047 (2013.01); H01L 41/08 (2013.01); B06B 2201/20 (2013.01); B06B 2201/55 (2013.01); G06F 2203/04101 (2013.01); G10K 11/341 (2013.01);
Abstract

A piezoelectric micromechanical ultrasonic transducer (PMUT) includes a diaphragm disposed over a cavity, the diaphragm including a piezoelectric layer stack including a piezoelectric layer, a first electrode electrically coupled with transceiver circuitry, and a second electrode electrically coupled with the transceiver circuitry. The first electrode may be disposed in a first portion of the diaphragm, and the second electrode may be disposed in a second, separate, portion of the diaphragm. Each of the first and the second electrode is disposed on or proximate to a first surface of the piezoelectric layer, the first surface being opposite from the cavity. The PMUT is configured to transmit first ultrasonic signals by way of the first electrode during a first time period and to receive second ultrasonic signals by way of the second electrode during a second time period, the first time period and the second time period being at least partially overlapping.


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