The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 19, 2018
Filed:
Oct. 24, 2014
Applicants:
Board of Regents, the University of Texas System, Austin, TX (US);
Tushar Sharma, Austin, TX (US);
Xiaojing Zhang, Austin, TX (US);
Inventors:
Tushar Sharma, Austin, TX (US);
Xiaojing Zhang, Austin, TX (US);
Assignee:
BOARD OF REGENTS, THE UNIVERSITY OF TEXAS SYSTEM, Austin, TX (US);
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
G01L 1/16 (2006.01); H01L 41/087 (2006.01); H01L 41/113 (2006.01); H01L 41/22 (2013.01); G01L 9/00 (2006.01); H01L 41/193 (2006.01); H01L 41/29 (2013.01); H01L 41/314 (2013.01); H01L 41/332 (2013.01); G01L 9/08 (2006.01);
U.S. Cl.
CPC ...
G01L 1/16 (2013.01); G01L 9/008 (2013.01); H01L 41/087 (2013.01); H01L 41/1132 (2013.01); H01L 41/193 (2013.01); H01L 41/22 (2013.01); H01L 41/29 (2013.01); H01L 41/314 (2013.01); H01L 41/332 (2013.01); G01L 9/08 (2013.01);
Abstract
A method of fabricating a pressure sensor is disclosed. Initially, a first metal is deposited on top of a substrate, and the first metal is patterned accordingly. A PVDF-TrFE nano fiber is then deposited on top of the first metal layer, and the PVDF-TrFE nano fiber is etched. A second metal layer is subsequently deposited on top of the PVDF-TrFE nano fiber, and the second metal layer is etched to form a pressure sensor.