The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 19, 2018
Filed:
Jun. 14, 2010
Tooru Miwata, Chiba, JP;
Keiichi Ishii, Chiba, JP;
Katsuhide Machida, Chiba, JP;
Yoshinobu Ohtachi, Chiba, JP;
Yasushi Maejima, Chiba, JP;
Tsutomu Takaada, Chiba, JP;
Tooru Miwata, Chiba, JP;
Keiichi Ishii, Chiba, JP;
Katsuhide Machida, Chiba, JP;
Yoshinobu Ohtachi, Chiba, JP;
Yasushi Maejima, Chiba, JP;
Tsutomu Takaada, Chiba, JP;
Edwards Japan Limited, Chiba, JP;
Abstract
To provide a vacuum pump capable of performing temperature control using one or more heating devices or cooling devices fewer than the number of temperature sensors arranged in the pump. One temperature sensor is arranged for each target in the pump, while only one set consisting of a heater and a magnetic valve is arranged. One set consisting of a heater and a magnetic valve is controlled based on output signals from a plurality of temperature sensors, based on the priorities set for the temperature sensors. As stated above, by setting priorities for the temperature sensors, the temperature of a target provided with a temperature sensor given a higher priority is settled within a control range by performing quick ON/OFF control, and then the temperature of a target provided with a temperature sensor given a lower priority is settled within the control range.