The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 19, 2018
Filed:
Mar. 03, 2016
Sumitomo Heavy Industries, Ltd., Tokyo, JP;
Ken Oikawa, Tokyo, JP;
SUMITOMO HEAVY INDUSTRIES, LTD., Tokyo, JP;
Abstract
A cryopump controller includes a regeneration controller that controls a cryopump in accordance with a regeneration sequence including a condensate discharging process being continued until a discharging completion condition based on pressure in the cryopump is met. The regeneration controller includes a first determiner repetitively determining whether the discharging completion condition is met, a second determiner determining whether the number of times of determination for the completion condition or a period of time for which the discharging process continues is equal to or larger than a threshold value, and a temperature controller performing preliminary cooling of the cryopump if the number of times of determination for the completion condition or the period of time for which the discharging process continues is equal to or larger than the threshold value. The first determiner re-determines during the preliminary cooling whether the completion condition is met.