The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 19, 2018

Filed:

Aug. 30, 2011
Applicants:

Wei Kong, Anhui, CN;

Zijing Lin, Anhui, CN;

Ming LI, Anhui, CN;

Bin Xie, Anhui, CN;

Haiqian Wang, Anhui, CN;

Yousong Jiang, Yokohama, JP;

Ekishu Nagae, Yokohama, JP;

Inventors:

Wei Kong, Anhui, CN;

Zijing Lin, Anhui, CN;

Ming Li, Anhui, CN;

Bin Xie, Anhui, CN;

Haiqian Wang, Anhui, CN;

Yousong Jiang, Yokohama, JP;

Ekishu Nagae, Yokohama, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 14/00 (2006.01); C25B 11/00 (2006.01); C25B 13/00 (2006.01); C23C 14/35 (2006.01); H01J 37/34 (2006.01); H01F 7/08 (2006.01); H01J 25/50 (2006.01);
U.S. Cl.
CPC ...
C23C 14/351 (2013.01); C23C 14/35 (2013.01); H01F 7/081 (2013.01); H01J 25/50 (2013.01); H01J 37/3405 (2013.01); H01J 37/3452 (2013.01); H01J 37/3461 (2013.01);
Abstract

A magnetic field generator arranged behind a target and for generating a magnetic field on a front surface of the target based on magnetic force lines can include a ring-shaped outer magnetic body having a pole axis in a parallel direction (X-direction) with respect to the target surface, a center magnetic body arranged on an inner side of the outer magnetic body and having a pole axis in a parallel direction (X-direction) with the direction of the pole axis of the outer magnetic body, a yoke plate for supporting the outer magnetic body and the center magnetic body from behind, and a magnetic permeable plate for changing a magnetic field distribution of the front surface of the target. The magnetic permeable plate is arranged so as to be supported by the yoke plate from behind.


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