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Yoshihiro Kondo

USPTO Granted Patents = 6

Average Co-Inventor Count = 3.1

ph-index = 1

Forward Citations = 457(Granted Patents)

Location History:

Koshi, JP (2010 - 2019)
Kumamoto, JP (2015 - 2023)

Company Filing History:

6 out of 10,295

Tokyo Electron Limited

Years Active: 2010-2023

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6 patents (USPTO):Sort by Forward CitationsExplore Patents

1. 11693319 - Substrate processing method, substrate processing apparatus, and storage medium (2023-07-04),

2. 10520831 - Substrate processing method, substrate processing system and substrate processing apparatus (2019-12-31),

3. 8927906 - Heating device, coating/developing system, heating method, coating/developing method, and recording medium having program for executing heating method or coating/developing method (2015-01-06),

4. 8455183 - Resist pattern slimming treatment method (2013-06-04),

5. 8041525 - Substrate measuring method, computer-readable recording medium recording program thereon, and substrate measuring system (2011-10-18),

6. 7822574 - Substrate measuring method, computer-readable recording medium recording program thereon, and substrate processing system (2010-10-26),

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