Location History:
- Hsinchu, TW (2011)
- Hsinchu County, TW (2014)
Company Filing History:
Years Active: 2011-2014
Title: Innovations by Yi-Pin Chang in Semiconductor Processing
Introduction
Yi-Pin Chang is a notable inventor based in Hsinchu County, Taiwan. He has made significant contributions to the field of semiconductor processing, holding two patents that showcase his innovative approach to technology.
Latest Patents
One of Yi-Pin Chang's latest patents is a piping system and control for semiconductor processing. This invention involves a vacuum system designed for semiconductor fabrication. The system includes a vacuum chamber for performing the fabrication process, a vacuum source, and a piping system that fluidly connects the vacuum chamber to the vacuum source. Notably, the piping system is configured without a horizontal flow path section of piping. In some embodiments, it features a first piping branch and a second piping branch, which are symmetrically configured with respect to the vacuum source. Additionally, each branch includes a throttle valve to enhance functionality.
Another significant patent by Yi-Pin Chang is the multi-zone electrostatic chuck and chucking method. This method involves processing a semiconductor wafer by measuring data that indicates the amount of warpage of the wafer. Based on this warpage, at least two different voltages are determined and applied to respective portions of the wafer by an electrostatic chuck. This innovative approach allows for effective holding of the wafer while performing fabrication processes.
Career Highlights
Yi-Pin Chang is currently employed at Taiwan Semiconductor Manufacturing Company Limited, a leading firm in the semiconductor industry. His work focuses on advancing technologies that improve semiconductor fabrication processes.
Collaborations
Throughout his career, Yi-Pin Chang has collaborated with notable colleagues, including Tung Long Lai and Soon Kang Huang. These collaborations have contributed to the development of innovative solutions in semiconductor technology.
Conclusion
Yi-Pin Chang's contributions to semiconductor processing through his patents reflect his expertise and innovative spirit. His work continues to influence the industry and drive advancements in technology.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.