Location History:
- Kamakura, JP (1993)
- Kawasaki, JP (1996 - 2006)
Company Filing History:
Years Active: 1993-2006
Title: Toshiro Nakanishi: Innovator in Semiconductor Technology
Introduction
Toshiro Nakanishi is a prominent inventor based in Kawasaki, Japan. He has made significant contributions to the field of semiconductor technology, holding a total of 6 patents. His innovative approaches have advanced the manufacturing processes of semiconductor devices, particularly in the area of gate insulating films.
Latest Patents
Nakanishi's latest patents include a manufacture system for semiconductor devices with thin gate insulating films. This method involves several steps, including transporting a silicon wafer into a reaction chamber, introducing an oxidizing atmosphere, and forming a thermal oxide film on the wafer's surface. The process also includes purging the chamber with inert gas to lower residual water concentration and introducing nitrogen to form an oxynitride film. This innovative approach allows for the production of a thin oxynitride film with high mass productivity. Another notable patent describes a method for fabricating semiconductor devices by selectively introducing halogen elements or argon into a silicon substrate. This method enhances the reliability of gate insulation films compared to those formed by dry oxidation.
Career Highlights
Toshiro Nakanishi is currently employed at Fujitsu Corporation, where he continues to develop cutting-edge technologies in semiconductor manufacturing. His work has been instrumental in improving the efficiency and reliability of semiconductor devices.
Collaborations
Throughout his career, Nakanishi has collaborated with notable colleagues, including Taro Sugizaki and Yasuhisa Sato. These partnerships have fostered innovation and contributed to the advancement of semiconductor technology.
Conclusion
Toshiro Nakanishi's contributions to semiconductor technology through his patents and work at Fujitsu Corporation highlight his role as a leading inventor in the field. His innovative methods for manufacturing semiconductor devices continue to influence the industry and pave the way for future advancements.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.