Toshinobu Morioka

Title: Innovations of Toshinobu Morioka

Introduction

Toshinobu Morioka is a prominent inventor based in Fujisawa, Japan. He has made significant contributions to the field of exposure methods and apparatuses, particularly in the context of device manufacturing. With a total of 5 patents to his name, Morioka's work has had a substantial impact on the industry.

Latest Patents

Morioka's latest patents include an exposure method, exposure apparatus, and device manufacturing method. In his innovative approach, he utilizes a progressive focus exposure method to project a pattern formed on a mask onto a substrate. This method involves a control unit that adjusts the distribution of energy supplied to the substrate based on the relative positions of the imaging plane and the substrate surface. By changing the energy distribution in accordance with the variations in resist layer thickness, he significantly increases the depth of focus of the projection optical system and minimizes variations in the shapes of pattern images formed on the substrate.

Another notable patent involves an exposure apparatus, method, and storage medium. This invention features a display unit that shows a shot map, allowing an operator to designate evaluation points. The exposure control unit computes the position coordinates on a projection area corresponding to these designated points. When overlapping portions are detected in the exposed pattern, the system outputs corresponding pattern candidates for the operator to select from. This innovation enhances operational efficiency by enabling quick and accurate designation of evaluation points.

Career Highlights

Morioka is currently employed at Nikon Corporation, a leading company in imaging and optical products. His work at Nikon has allowed him to further develop his expertise in exposure technologies and contribute to advancements in the field.

Collaborations

Throughout his career, Morioka has collaborated with notable colleagues, including Nobutaka Fujimori and Toshio Matsuura. These collaborations have fostered a creative environment that has led to the development of groundbreaking technologies.

Conclusion

Toshinobu Morioka's contributions to the field of exposure methods and apparatuses have established him as a key figure in the industry. His innovative patents and work at Nikon Corporation continue to influence advancements in device manufacturing.