Takaharu Yamada

Title: Takaharu Yamada: Innovator in Substrate Processing Technology

Introduction

Takaharu Yamada is a prominent inventor based in Kyoto, Japan. He has made significant contributions to the field of substrate processing technology, holding a total of 4 patents. His innovative work focuses on improving the efficiency and effectiveness of substrate transport and processing systems.

Latest Patents

One of Yamada's latest patents is a substrate processing apparatus that features a cell controller. This controller manages the operation of a transport robot to ensure that substrates from a succeeding lot are not prematurely transported out of the heating part during the transport cycles. By preventing interference between the transport of substrates from different lots, the system enhances processing efficiency. Another notable patent involves a substrate processing apparatus that includes multiple cells, each with its own processing unit and transport mechanism. The cell controller independently manages operations based on specific recipe data, allowing for parallel processing of different substrate units within the same cell.

Career Highlights

Takaharu Yamada has dedicated his career to advancing substrate processing technologies. His work at Dainippon Screen Mfg. Co., Ltd. has positioned him as a key figure in the industry. His patents reflect a deep understanding of the complexities involved in substrate transport and processing, showcasing his innovative approach to solving industry challenges.

Collaborations

Yamada has collaborated with notable colleagues such as Kenji Hashinoki and Yasufumi Koyama. Their combined expertise has contributed to the development of cutting-edge technologies in substrate processing.

Conclusion

Takaharu Yamada's contributions to substrate processing technology demonstrate his commitment to innovation and efficiency. His patents not only reflect his technical expertise but also his ability to address real-world challenges in the industry.