Shusaku Matsumoto

Title: Shusaku Matsumoto: Innovator in Substrate Processing Technology

Introduction

Shusaku Matsumoto is a notable inventor based in Saitama, Japan. He has made significant contributions to the field of substrate processing technology, holding a total of 2 patents. His work focuses on improving the efficiency and effectiveness of substrate processing apparatuses and devices.

Latest Patents

Matsumoto's latest patents include a "Substrate Processing Apparatus" and a "Substrate Processing Device." The substrate processing apparatus features a processing tank that stores a processing solution and houses multiple substrates arranged in a predetermined direction. It includes an inner wall that partially covers the substrate surfaces and allows for the flow of the processing solution. The processing solution nozzle is strategically positioned to create an upward flow within the inner wall. The substrate processing device, on the other hand, is designed to accumulate liquid and transport semiconductor substrates into the processing tank using a conveyer. It also incorporates multiple liquid suppliers and current plates to enhance the processing efficiency.

Career Highlights

Matsumoto has established himself as a key figure in the substrate processing industry. His innovative designs and patents have contributed to advancements in semiconductor manufacturing processes. He is associated with Kioxia Corporation, where he continues to develop cutting-edge technologies.

Collaborations

Matsumoto has worked alongside talented colleagues such as Koichiro Kawano and Shigeru Kinoshita. Their collaborative efforts have further propelled advancements in substrate processing technologies.

Conclusion

Shusaku Matsumoto's contributions to substrate processing technology are noteworthy, with his patents reflecting a commitment to innovation and efficiency. His work continues to influence the semiconductor industry positively.