Ryo Yamasaki

Title: Ryo Yamasaki: Innovator in Electrostatic Chuck Technology

Introduction

Ryo Yamasaki is a prominent inventor based in Hyogo, Japan. He has made significant contributions to the field of electrostatic chuck technology, holding a total of 3 patents. His innovative designs have addressed various challenges in manufacturing processes, particularly in the semiconductor industry.

Latest Patents

Yamasaki's latest patents include an electrostatic chuck and a method of manufacturing it. This invention eliminates the drawbacks associated with using adhesives, providing a high degree of design freedom. The electrostatic chuck consists of a substrate part that forms the main chuck body, a first insulating layer created through spray coating, and a heater part made from a conductive paste applied to the first insulating layer. Additionally, a second insulating layer covers the heater part, while an electrode part is formed by thermal spraying on the second insulating layer. Finally, a dielectric layer is applied to reduce volume resistivity without the need for adhesives.

Another notable patent is for a substrate mounting table designed for plasma processing apparatus. This table features an electrostatic chuck that holds a target substrate and a base that supports the chuck. The base includes a protruding portion with a significant height, and a thermally sprayed film is deposited on the outer peripheral surface to ensure continuity with the protruding portion. This design enhances the functionality of the electrostatic chuck while maintaining structural integrity.

Career Highlights

Throughout his career, Ryo Yamasaki has worked with notable companies such as Tokyo Electron Limited and Tocalo Co., Ltd. His experience in these organizations has allowed him to refine his skills and contribute to advancements in electrostatic chuck technology.

Collaborations

Yamasaki has collaborated with talented individuals in his field, including Yoshiyuki Kobayashi and Takahiro Murakami. These partnerships have fostered innovation and have been instrumental in the development of his patented technologies.

Conclusion

Ryo Yamasaki's contributions to electrostatic chuck technology have significantly impacted the semiconductor manufacturing industry. His innovative patents and collaborations highlight his dedication to advancing technology in this field.