Company Filing History:
Years Active: 1987
Title: Richard L. Bersin: Innovator in Substrate Processing Technologies
Introduction
Richard L. Bersin is a notable inventor based in Orange, Connecticut. He has made significant contributions to the field of substrate processing, holding a total of 3 patents. His work focuses on methods and apparatuses that enhance the efficiency and effectiveness of substrate treatment processes.
Latest Patents
Among his latest patents is a method and apparatus for dry processing of substrates. This innovative method involves removing photoresist from a substrate by producing a gas plasma from a mixture of gases, including oxygen, CF.sub.4, nitrogen, and hydrogen. The process ensures the elimination of electrically charged particles from the plasma, resulting in a refined plasma effluent. The substrate is heated to a temperature between 250 to 300 degrees Centigrade, and during this heating, the substrate and photoresist are exposed to the effluent while simultaneously being irradiated with collimated ultraviolet radiation.
Another significant patent by Bersin also pertains to dry processing of substrates. This invention describes an apparatus and process for uniform dry treatment of a substrate's surface. It involves supplying a gas plasma composition through a first inlet port into a treatment chamber containing the substrate. A second gas is introduced through a second inlet port, redirecting the gas plasma composition to ensure uniform contact with the substrate.
Career Highlights
Richard L. Bersin is currently associated with Emergent Technologies, LLC, where he continues to innovate and develop advanced substrate processing technologies. His expertise and inventions have positioned him as a key figure in the field.
Collaborations
[This section has been skipped due to space constraints.]
Conclusion
Richard L. Bersin's contributions to substrate processing technologies through his innovative patents demonstrate his commitment to advancing the field. His work continues to influence the industry and pave the way for future innovations.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.