Company Filing History:
Years Active: 2023-2025
Title: Ramachandran Subramanian: Innovator in Virtual Metrology
Introduction
Ramachandran Subramanian is a notable inventor based in Chennai, India. He has made significant contributions to the field of virtual metrology, particularly in predicting film thickness during deposition processes. With a total of 3 patents to his name, Subramanian's work is recognized for its innovative approach and practical applications.
Latest Patents
One of his latest patents is titled "Systems and methods for predicting film thickness using virtual metrology." This method involves obtaining sensor data associated with a deposition process performed in a process chamber to deposit film on a substrate's surface. A plurality of physics-based outputs are generated using a transformation function and the sensor data. The transformation function is utilized to estimate site availability for growth at an equilibrium condition for the process chamber or to estimate boundary layer thickness in an equilibrium condition for the process chamber. The physics-based outputs are then mapped to a training set, and a virtual model is trained based on this training set and the sensor data. The virtual model is designed to generate predictive metrology data associated with the film.
Career Highlights
Ramachandran Subramanian is currently employed at Applied Materials, Inc., where he continues to develop innovative solutions in the field of materials engineering. His expertise in virtual metrology has positioned him as a key player in advancing technologies related to film deposition processes.
Collaborations
Some of his notable coworkers include Raman K Nurani and Bharath Ram Sundar, who collaborate with him on various projects within the company.
Conclusion
Ramachandran Subramanian's contributions to virtual metrology and his innovative patents highlight his role as a leading inventor in the field. His work continues to influence advancements in film deposition technologies, showcasing the importance of innovation in engineering.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.