Radiation Monitoring Devices, Inc.

Zsolt Marton

Vivek V Nagarkar

Harish B Bhandari

An antireflective structure and a fabrication method thereof are disclosed. In one aspect, the antireflective structure includes a substrate, a buffer layer on the substrate, and an anticorrosion layer on the buffer layer, wherein the corrosion resistant layer comprises a densely packed cubic lattice structure. In one aspect, the fabrication method includes depositing a first buffer layer on a substrate in an e-beam deposition process, and depositing a first anticorrosion layer on the first buffer layer in an e-beam deposition process, wherein the substrate comprises sapphire, the first corrosion resistant layer comprises lutetia, and the first buffer layer comprise silicon carbide.

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Watertown, MA, United States of America

Zsolt Marton