Tsinghua University

Beijing U-precision Tech Co., Ltd.

Ziwen Guo

Yu Zhu

Rong Cheng

Ming Zhang

Leijie Wang

Weinan Ye

Zhaokui Cheng

Disclosed is a heterodyne grating interferometry system based on secondary diffraction, including a single-frequency laser, an input optical fiber, an acousto-optic modulator, a reading head, and a measurement grating, an output optical fiber, a photoelectric conversion unit and an electronic signal processing unit, wherein the single-frequency laser emits a single-frequency laser, which enters the acousto-optic modulator through the input optical fiber, and is divided into a reference light and measurement light to be input to the reading head, wherein the reading head and the measurement grating convert the reference light and measurement light into a reference interference optical signal and a measurement interference optical signal and send them to the photoelectric conversion unit through the output optical fiber and wherein the photoelectric conversion unit converts the measurement interference optical signal and the reference interference optical signal into a measurement interference electrical signal and a reference interference electrical signal.

Heterodyne grating interferometry system based on secondary diffraction

Growing community of inventors

Beijing, China

Ziwen Guo