University of Science and Technology of China

Shincron Co., Ltd.

Zijing Lin

Yousong Jiang

Ming Li

Ekishu Nagae

Bin Xie

Haiqian Wang

Wei Kong

A magnetic field generator arranged behind a target and for generating a magnetic field on a front surface of the target based on magnetic force lines can include a ring-shaped outer magnetic body having a pole axis in a parallel direction (X-direction) with respect to the target surface, a center magnetic body arranged on an inner side of the outer magnetic body and having a pole axis in a parallel direction (X-direction) with the direction of the pole axis of the outer magnetic body, a yoke plate for supporting the outer magnetic body and the center magnetic body from behind, and a magnetic permeable plate for changing a magnetic field distribution of the front surface of the target. The magnetic permeable plate is arranged so as to be supported by the yoke plate from behind.

Magnetic field generator, magnetron cathode and spattering apparatus

Growing community of inventors

Anhui, China

Zijing Lin