University of Illinois

Zihao Ou

J Gary Eden

Xiuling Li

Wen Huang

Zhendong Yang

Mark D Kraman

Jimmy Ni

Qian Chen

A rolled-up electromagnetic component for on-chip applications comprises: a multilayer sheet in a rolled configuration comprising at least one turn about a longitudinal axis; a core defined by a first turn of the rolled configuration; and a soft magnetic material disposed within the core, where the multilayer sheet comprises a conductive pattern layer on a strain-relieved layer. A method of making a rolled-up electromagnetic component for on-chip applications includes forming a rolled-up device comprising: a multilayer sheet in a rolled configuration having at least one turn about a longitudinal axis, where the multilayer sheet comprises a conductive pattern layer on a strain-relieved layer; and a core defined by a first turn of the rolled configuration. The method further includes introducing a soft magnetic material into the core.

Rolled-up electromagnetic component for on-chip applications and method of making a rolled-up electromagnetic component

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Urbana, IL, United States of America

Zihao Ou