Kla Tencor Corporation

Zhuoxian Zhang

Jianou Shi

Nanchang Zhu

Walter H Johnson, Iii

Xianghua Liu

Lu Yu

Fan Zhang

Jianli Cui

Haiyang You

Zhu-bin Shi

Lansheng Dong

Haijing Peng

Jiazhou Jin

Resistivity probes can be used to test integrated circuits. In one example, a resistivity probe has a substrate with multiple vias and multiple metal pins. Each of the metal pins is disposed in one of the vias. The metal pins extend out of the substrate. Interconnects provide an electrical connection to the metal pins. In another example, a resistivity probe has a substrate with a top surface and multiple elements extending from the substrate. Each of the elements curves from the substrate to a tip of the element such that each of the elements is non-parallel to the top surface of the substrate.

Resistivity probes with curved portions

Resistivity probe having movable needle bodies

A continuous variable spacing probe pin device, including first and second probe pins. The first and second probe pins are configured to measure a property of a conductive layer. In a first configuration, the first and second probe pins include respective first portions arranged to contact the conductive layer to measure the property. In a second configuration, the first and second probe pins include respective second portions arranged to contact the conductive layer to measure the property. A first area for each respective first portion is different from a second area for each respective second portion.

Variable spacing four-point probe pin device and method

Growing community of inventors

Shanghai, China

Zhuoxian Zhang