Beijing Baidu Netcom Science and Technology Co., Ltd.

Beijing Nmc Co., Ltd.

Beijing Naura Microelectronics Equipment Co., Ltd.

Zhongwei Jiang

Jizhou Huang

Shiqiang Ding

Wentao Ma

The present disclosure provides methods, computing devices, and storage media for generating a training corpus. The method includes: mining out pieces of data from user behavior logs associated with a target application, each piece of data including a first behavior log and a second behavior log, the first behavior log including a user speech and a corresponding speech recognition result, the second behavior log belonging to the same user as the first behavior log and time-dependent with the first behavior log; and determining the user speech and the corresponding speech recognition result in each piece of data as a positive feedback sample or a negative feedback sample, based on the first behavior log and the second behavior log.

Methods, computing devices, and storage media for generating training corpus

Embodiments of the invention provide a substrate etching method, which includes: a deposition operation for depositing a polymer on a side wall of a silicon groove, an etching operation for etching the side wall of the silicon groove, and repeating the deposition operation and the etching operation at least twice. In the process of completing all cycles of the etching operation, a chamber pressure of a reaction chamber is decreased from a preset highest pressure to a preset lowest pressure according to a preset rule. The substrate etching method, according to various embodiments of the invention, avoid the problem of damaging the side wall, thereby making the side wall smooth.

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Beijing, China

Zhongwei Jiang